School of Engineering
Our Clean Room
The Solid State Electronics Fabrication lab consists of a class 10,000 clean room with approximately 1,000 square feet of work area. The temperature and humidity of the lab are tightly controlled to be 70° ±5° and 42.5% ±3%, respectively. The lab is capable of processes including silicon-based optoelectronics and 3 µm metal-gate NMOS and supports both undergraduate research and education in the areas of solid state devices, integrated circuits, and MEMs/NEMs.
This work has been supported by an National Science Foundation (NSF) grant number
Page last modified February 23, 2012