The Solid State Electronics Fabrication lab consists of a class 10,000 clean room with approximately 1,000 square feet of work area. The temperature and humidity of the lab are tightly controlled to be 70° ±5° and 42.5% ±3%, respectively. The lab is capable of processes including silicon-based optoelectronics and 3 µm metal-gate NMOS and supports both undergraduate research and education in the areas of solid state devices, integrated circuits, and MEMs/NEMs. Click here to see the clean room. 

• Two Mask Aligners
• Spin-Coating System
• Diffusion Doping Furnace
• Wet and Dry Oxidation Furnace
• Thermal Annealing Furnace
• Thermal Evaporation System
• Wet Chemistry Benches

• Atomic Force Microscope (AFM)
• Scanning Electron Microscope (SEM)
• Optical Microscopes
• Four Point Probes
• Semiconductor Parameter Analyzers
• Ellipsometer